METHOD FOR SETTING A POSITION OF A COMPONENT OF A PARTICLE BEAM DEVICE AND PARTICLE BEAM DEVICE FOR CARRYING OUT THE METHOD

The invention relates to a method for setting a position of a component (1003) in a particle beam apparatus, and to a particle beam apparatus for carrying out the method, wherein the component (1003) is embodied as a gas feed device, as a particle detector and/or as a beam detector, and wherein the method comprises the following steps: aligning the component (1003) with a coincidence point (2000) of a particle beam of the particle beam apparatus, determining a rotation angle (a) of a rotation of an object carrier about a rotation axis (603), loading a position of the component (1003) associated with the rotation angle (a) from a database into a control unit, transmitting a control signal from the control unit to a drive unit for moving the component (1003), and moving the component (1003) into the position loaded from the database by means of the drive unit, wherein the component (1003) arranged in the loaded position is at a predefinable distance (OAB) from the object.