SEMICONDUCTOR DEVICES AND METHODS OF FABRICATING THE SAME

Semiconductor devices and methods of fabricating the same are provided. The methods of fabricating the semiconductor devices may include providing a substrate including an active pattern protruding from the substrate, forming a first liner layer and a field isolating pattern on the substrate to cove...

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Bibliographische Detailangaben
Hauptverfasser: KIM, Cheol, HONG, Sanghyuk, KWON, TaeYong, LEE, Tae-Jong, KIM, Sunjung
Format: Patent
Sprache:eng
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Zusammenfassung:Semiconductor devices and methods of fabricating the same are provided. The methods of fabricating the semiconductor devices may include providing a substrate including an active pattern protruding from the substrate, forming a first liner layer and a field isolating pattern on the substrate to cover a lower portion of the active pattern, forming a second liner layer on an upper portion of the active pattern and the field isolation pattern, and forming a dummy gate on the second liner layer.