CLEANING OF NANOSTRUCTURES

The present invention relates to a method for removing a polymeric material from a surface of a nanostructure. The method includes applying, by a scanning probe microscope, an electrical field between a probe tip of the scanning probe microscope and the nanostructure, and simultaneously scanning ove...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: Nirmalraj, Pio Peter Niraj
Format: Patent
Sprache:eng
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