SEMICONDUCTOR MEMORY DEVICE

A semiconductor memory device includes: a substrate including a first and a second regions; first wiring layers disposed in a first direction; a second wiring layer; a third wiring layer closer to the substrate than the first and the second wiring layers; a semiconductor film that penetrates the fir...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KOMIYA, Ken, HIROTSU, Yu, NAKAKUBO, Yoshinori, ITO, Takamasa, TOMISHIGE, Kazuhiro, YAMAMOTO, Naoki
Format: Patent
Sprache:eng
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