DEVICES WITH SLOTTED ACTIVE REGIONS

DEVICES WITH SLOTTED ACTIVE REGIONS

The present disclosure relates to semiconductor structures and, more particularly, to devices with slotted active regions and methods of manufacture. The method includes: forming a mandrel on top of a diffusion region comprising a diffusion material; forming a first material over the mandrel and the...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: LEI, Lixia, SUN, Kai, NAYYAR, Neha, PRABHU, Manjunatha G, PRITCHARD, David C, MITTAL, Anurag, YANG, Heng, REN, Hongru, KLUTH, George J
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:The present disclosure relates to semiconductor structures and, more particularly, to devices with slotted active regions and methods of manufacture. The method includes: forming a mandrel on top of a diffusion region comprising a diffusion material; forming a first material over the mandrel and the diffusion region; removing the mandrel to form multiple spacers each having a thickness; depositing a second material over the spacers and the diffusion material; and forming slots in the diffusion region by removing a portion of the second material over the diffusion region and the underlying diffusion material.