Liquid Ejection Head Including Vibrating Film and Piezoelectric Film Deflecting Toward Pressure Chambers
A liquid ejection head includes: nozzles; a channel member including a plurality of pressure chambers each in communication with a corresponding one of the nozzles; and a plurality of piezoelectric elements corresponding to the pressure chambers. Each piezoelectric element includes: a vibrating film...
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Sprache: | eng |
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Zusammenfassung: | A liquid ejection head includes: nozzles; a channel member including a plurality of pressure chambers each in communication with a corresponding one of the nozzles; and a plurality of piezoelectric elements corresponding to the pressure chambers. Each piezoelectric element includes: a vibrating film covering the corresponding pressure chamber; a piezoelectric film positioned opposite to the pressure chamber with respect to the vibrating film; a first electrode interposed between the vibrating film and the piezoelectric film; and a second electrode having compressive stress and positioned opposite to the vibrating film with respect to the piezoelectric film. The piezoelectric film has a ratio of (001) orientation to (100) orientation that is equal to or greater than 50%. The vibrating film and the piezoelectric film are deflected convexly toward the corresponding pressure chamber while no potential difference is produced between the first electrode and the second electrode. |
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