METHOD OF MANUFACTURING THROUGH HOLE OF SUBSTRATE

A method of manufacturing a through hole of a substrate includes forming, to the substrate, a cutting hole surrounding a removal-target-part such that a connection part of the substrate remains, the connection part that connects the removal-target-part that is removed from the substrate and a remain...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Kitagawa, Takahiro, Abe, Mitsunori, Hatanaka, Kiyoyuki, Sugino, Shigeru, Kanai, Ryo, Taketomi, Nobuo
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A method of manufacturing a through hole of a substrate includes forming, to the substrate, a cutting hole surrounding a removal-target-part such that a connection part of the substrate remains, the connection part that connects the removal-target-part that is removed from the substrate and a remaining part other than the removal-target-part that has been removed, along a cutting line of the through hole formed to the substrate; applying plating on an area including an inner peripheral wall face of the cutting hole of the substrate; applying a film covering an opening of the cutting hole on a surface of the substrate applied with the plating and performing exposure and development of the film to form an etching resist covering an area including the opening of the cutting hole; performing etching of the plating applied on the substrate; removing the etching resist; and cutting the connection part to remove the removal-target-part.