Mirror Array

A mirror array, at least some of the mirrors of the array comprising a reflective surface and an arm which extends from a surface opposite to the reflective surface, wherein the mirror array further comprises a support structure provided with a plurality of sensing apparatuses, the sensing apparatus...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Gang, Tian, Steeghs, Marco, Matheus, Louis, Yousefi Moghaddam, Mehdi
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A mirror array, at least some of the mirrors of the array comprising a reflective surface and an arm which extends from a surface opposite to the reflective surface, wherein the mirror array further comprises a support structure provided with a plurality of sensing apparatuses, the sensing apparatuses being configured to measure gaps between the sensing apparatuses and the arms which extend from the mirrors.