PRESSURE SENSOR
A pressure sensor is provided. Provided is a pressure sensor including a tubular housing which defines an axial line, a diaphragm which is fixed to a tip end of the housing and exposed to a pressured medium, a pressure measurement member which is constituted by a first electrode, a piezoelectric ele...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A pressure sensor is provided. Provided is a pressure sensor including a tubular housing which defines an axial line, a diaphragm which is fixed to a tip end of the housing and exposed to a pressured medium, a pressure measurement member which is constituted by a first electrode, a piezoelectric element, and a second electrode which are sequentially stacked in a direction of the axial line from the tip end side inside the housing, and a preload imparting member which is disposed inside the housing and is configured such that a center region centering on the axial line is configured to have a solid form to impart a preload by pressing the pressure measurement member toward the diaphragm. |
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