PRESSURE SENSOR

A pressure sensor is provided. Provided is a pressure sensor including a tubular housing which defines an axial line, a diaphragm which is fixed to a tip end of the housing and exposed to a pressured medium, a pressure measurement member which is constituted by a first electrode, a piezoelectric ele...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: FUKUI, Katsuhiko, SATO, Tomoya
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A pressure sensor is provided. Provided is a pressure sensor including a tubular housing which defines an axial line, a diaphragm which is fixed to a tip end of the housing and exposed to a pressured medium, a pressure measurement member which is constituted by a first electrode, a piezoelectric element, and a second electrode which are sequentially stacked in a direction of the axial line from the tip end side inside the housing, and a preload imparting member which is disposed inside the housing and is configured such that a center region centering on the axial line is configured to have a solid form to impart a preload by pressing the pressure measurement member toward the diaphragm.