SiC SINTERED BODY, HEATER AND METHOD FOR PRODUCING SiC SINTERED BODY

Provided is a SiC sintered body which contains nitrogen atoms, wherein a ratio Rmax/Rave of a maximum volume resistivity Rmax of the sintered body to an average volume resistivity Rave of the sintered body is 1.5 or lower; a ratio Rmin/Rave of a minimum volume resistivity Rmin of the sintered body t...

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Bibliographische Detailangaben
Hauptverfasser: OOTOMO, Megumi, TAKAHASHI, Kentaro, NAGATOMO, Hiroaki
Format: Patent
Sprache:eng
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Zusammenfassung:Provided is a SiC sintered body which contains nitrogen atoms, wherein a ratio Rmax/Rave of a maximum volume resistivity Rmax of the sintered body to an average volume resistivity Rave of the sintered body is 1.5 or lower; a ratio Rmin/Rave of a minimum volume resistivity Rmin of the sintered body to the average volume resistivity Rave is 0.7 or higher; and a relative density of the sintered body is 98% or higher.