OPTICAL VERIFICATION SYSTEM AND METHODS OF VERIFYING MICRO DEVICE TRANSFER

OPTICAL VERIFICATION SYSTEM AND METHODS OF VERIFYING MICRO DEVICE TRANSFER

An optical verification method and mass transfer system described. In an embodiments, a mass transfer sequence may be accompanied by optical imaging and inspection to detect pick and place errors. The optical imaging and inspection techniques may be performed in-situ.

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Bibliographische Detailangaben
Hauptverfasser: Bibl, Andreas, Bathurst, Stephen P, Light, Nile A, Deming, Stephen R, Chan, Tsan Y, Czarnota, Patrick J, Higginson, John H, Parks, Paul Argus, Martin, Robert B
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COMPUTING
COUNTING
IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
PHYSICS
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Beschreibung
Zusammenfassung:An optical verification method and mass transfer system described. In an embodiments, a mass transfer sequence may be accompanied by optical imaging and inspection to detect pick and place errors. The optical imaging and inspection techniques may be performed in-situ.