VAPOR DELIVERY CONTAINER WITH FLOW DISTRIBUTOR

A chemical precursor container is disclosed. The container includes a vessel and a lid that define an interior volume, an inlet conduit, an outlet conduit, and a flow distributor positioned inside the vessel and in fluid flow communication with the inlet conduit. The flow distributor has an annular...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Eschbach, Robert, Birtcher, Charles Michael, Sheehy, William Jon, Nehlsen, James Patrick
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING HANDLING THIN OR FILAMENTARY MATERIAL PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL STORING THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	A chemical precursor container is disclosed. The container includes a vessel and a lid that define an interior volume, an inlet conduit, an outlet conduit, and a flow distributor positioned inside the vessel and in fluid flow communication with the inlet conduit. The flow distributor has an annular shape and includes a distributor floor having a plurality of apertures formed therein for expelling carrier gas therethrough. The flow distributor includes an inner annular wall that defines a porthole in the flow distributor that allows fluid to pass through the flow distributor from the interior volume of the vessel to the outlet conduit.