CONDUCTIVE POROUS CERAMIC SUBSTRATE AND METHOD OF MANUFACTURING SAME

The present invention relates to a conductive porous ceramic substrate and a method of manufacturing the same, and more particularly to a conductive porous ceramic substrate, in which a porous ceramic substrate used as a chuck or stage for fixing a thin semiconductor wafer substrate or display subst...

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Bibliographische Detailangaben
Hauptverfasser:	KIM, In Woong, CHOI, June Beom, KIM, Gyu Ha, BAIK, Seung Woo, JUNG, Jong Yeol, LEE, Chun Moo, KIM, Byoung Hak, SHIN, In Bum
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS CONCRETE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HAND TOOLS LIME, MAGNESIA MANIPULATORS METALLURGY PERFORMING OPERATIONS PORTABLE POWER-DRIVEN TOOLS REFRACTORIES SEMICONDUCTOR DEVICES SHAPING CLAY OR OTHER CERAMIC COMPOSITIONS, SLAG, OR MIXTURESCONTAINING CEMENTITIOUS MATERIAL, e.g. PLASTER SLAG TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FORFASTENING, CONNECTING, DISENGAGING OR HOLDING TRANSPORTING TREATMENT OF NATURAL STONE WORKING CEMENT, CLAY, OR STONE
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Beschreibung
Zusammenfassung:	The present invention relates to a conductive porous ceramic substrate and a method of manufacturing the same, and more particularly to a conductive porous ceramic substrate, in which a porous ceramic substrate used as a chuck or stage for fixing a thin semiconductor wafer substrate or display substrate through vacuum adsorption is imparted with antistatic performance so as to prevent the generation of static electricity, and a method of manufacturing the same.