INSPECTION SYSTEM AND MALFUNCTION ANALYSIS/PREDICTION METHOD FOR INSPECTION SYSTEM

An inspection system includes a prober, a tester and a malfunction analysis/prediction unit. The prober has a stage holding a substrate having multiple devices formed thereon, a transport unit that transfers the substrate to the stage, and a probe card that brings a plurality of probes into contact...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
1. Verfasser:	KAGAMI, Tetsuya
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	An inspection system includes a prober, a tester and a malfunction analysis/prediction unit. The prober has a stage holding a substrate having multiple devices formed thereon, a transport unit that transfers the substrate to the stage, and a probe card that brings a plurality of probes into contact with electrodes of the multiple devices on the substrate. A tester applies electrical signals to the multiple devices on the substrate through the probe card and inspects electrical characteristics of the multiple devices. The malfunction analysis/prediction unit, when a malfunction or a sign indicating a stage leading to the malfunction has occurred during an inspection, analyzes history information of the prober and tester related to the malfunction to determine or predict a location of the malfunction.