PRESSURE DETECTION UNIT AND PRESSURE SENSOR USING SAME

The present invention provides a pressure detection unit and a pressure sensor using the same that have a high degree of airtightness and that are capable of suppressing bonding defects even when the base is made of ceramics. In the pressure detection unit, a linear expansion coefficient of ceramic...

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Bibliographische Detailangaben
Hauptverfasser:	MUKAI, Motohisa, AOYAMA, Tomohisa, TAMURA, Youko, TAKATSUKI, Osamu, SHIMURA, Tomonori, OGIWARA, Kai
Format:	Patent
Sprache:	eng
Schlagworte:	CLADDING OR PLATING BY SOLDERING OR WELDING CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING MACHINE TOOLS MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE METAL-WORKING NOT OTHERWISE PROVIDED FOR PERFORMING OPERATIONS PHYSICS SOLDERING OR UNSOLDERING TESTING TRANSPORTING WELDING WORKING BY LASER BEAM
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Beschreibung
Zusammenfassung:	The present invention provides a pressure detection unit and a pressure sensor using the same that have a high degree of airtightness and that are capable of suppressing bonding defects even when the base is made of ceramics. In the pressure detection unit, a linear expansion coefficient of ceramic that forms the ceramic base 110 is set to Δ1 (10−6/K) and a linear expansion coefficient of metal that forms the metal ring member 140 is set to Δ2 (10−6/K), a relationship of 0.7×Δ2≤Δ1 exists between the linear expansion coefficients Δ1 and Δ2, and the metal ring member 140 is formed of a metal such as SUS420J2, SUS410, or SUS444, for example, which does not precipitate aluminum oxide on a brazing surface with a projecting portion.