CAMERA POSTURE ESTIMATION METHOD AND SUBSTRATE PROCESSING APPARATUS

A method for estimating a posture of a camera installed in a substrate processing apparatus to obliquely photograph an object includes removing the remaining background other than a substrate and performing ellipse fitting, adjusting a yaw direction of the camera by using a difference between the ce...

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Bibliographische Detailangaben

Hauptverfasser:	BAE, SUNG WOOK, KWON, OHYEOL, CHUN, SUNGYONG
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC COMMUNICATION TECHNIQUE ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY PICTORIAL COMMUNICATION, e.g. TELEVISION SEMICONDUCTOR DEVICES
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