DETECTING A FLUID LEAK IN A VACUUM CHAMBER
A method for detecting a fluid leak in a vacuum chamber of a degasser is provided. The method includes measuring a temperature of the vacuum chamber with a temperature sensing device, wherein a temperature drop of the vacuum chamber indicates the fluid leak within the vacuum chamber. An associated d...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A method for detecting a fluid leak in a vacuum chamber of a degasser is provided. The method includes measuring a temperature of the vacuum chamber with a temperature sensing device, wherein a temperature drop of the vacuum chamber indicates the fluid leak within the vacuum chamber. An associated degasser and further methods are also provided. |
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