KNOWLEDGE RECOMMENDATON FOR DEFECT REVIEW

A server for knowledge recommendation for defect review. The server includes a processor electronically coupled to an electronic storage device storing a plurality of knowledge files related to wafer defects. The processor is configured to execute a set of instruction to cause the server to: receive...

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Bibliographische Detailangaben
Hauptverfasser:	CHEN, Shih-Tsung, HUANG, Pang-Hsuan, GUO, Zhaohui, LAI, Shao-Wei, LIAO, Jian-Min, WANG, Yi-Ying, HSU, Shih-Tsung, TEH, Cho Huak, JIAN, Robeter, FANG, Wei, LI, Chuan
Format:	Patent
Sprache:	eng
Schlagworte:	CALCULATING COMPUTER SYSTEMS BASED ON SPECIFIC COMPUTATIONAL MODELS COMPUTING COUNTING HANDLING RECORD CARRIERS IMAGE DATA PROCESSING OR GENERATION, IN GENERAL PHYSICS PRESENTATION OF DATA RECOGNITION OF DATA RECORD CARRIERS
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Beschreibung
Zusammenfassung:	A server for knowledge recommendation for defect review. The server includes a processor electronically coupled to an electronic storage device storing a plurality of knowledge files related to wafer defects. The processor is configured to execute a set of instruction to cause the server to: receive a request for knowledge recommendation for inspecting an inspection image from a defect classification server; search for a knowledge file in the electronic storage device that matches the inspection image; and transmit the search result to the defect classification server.