METHOD FOR TREATMENT OF HEXACHLORODISILANE AND HYDROLYZED PRODUCT

A method for treatment of a hexachlorodisilane and its hydrolyzed product is disclosed. It comprises adding a hexachlorodisilane or its hydrolyzed product into a sulfuric acid solution for reaction.

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Bibliographische Detailangaben
Hauptverfasser:	WANG, CHENGIEH, LIN, YU-JHEN, LIU, CHIEN-HO, NGAI, EUGENE YIN, CHEN, JENQ-RENN, CHIN, MO-GENG, TSAI, HSIAO-YUN
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	A method for treatment of a hexachlorodisilane and its hydrolyzed product is disclosed. It comprises adding a hexachlorodisilane or its hydrolyzed product into a sulfuric acid solution for reaction.