ACOUSTIC WAVE RESONATOR, ACOUSTIC WAVE DEVICE, AND FILTER

An acoustic wave resonator includes: a piezoelectric substrate; a pair of comb-shaped electrodes that is located on the piezoelectric substrate and excites an acoustic wave, each of the pair of comb-shaped electrodes including a plurality of electrode fingers; and a polycrystalline substrate that is...

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Bibliographische Detailangaben
Hauptverfasser: KOMIYAMA, Ryohei, YAMAMOTO, Shinji, TSUKIDATE, Hitoshi
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:An acoustic wave resonator includes: a piezoelectric substrate; a pair of comb-shaped electrodes that is located on the piezoelectric substrate and excites an acoustic wave, each of the pair of comb-shaped electrodes including a plurality of electrode fingers; and a polycrystalline substrate that is located at an opposite side of the piezoelectric substrate from a surface on which the pair of comb-shaped electrodes is located, an average particle size of the polycrystalline substrate being equal to or less than 66 times an average pitch of the plurality of electrode fingers.