SAMPLE HOLDER

A sample holder includes: a ceramic substrate including a first circular main surface and a second circular main surface, the ceramic substrate including a first layer, a second layer and a third layer located in sequence; a conductive section located between the second layer and the third layer, th...

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Bibliographische Detailangaben
Hauptverfasser:	IIJIMA, Yasunori, TAKASAKI, Tomoya
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	A sample holder includes: a ceramic substrate including a first circular main surface and a second circular main surface, the ceramic substrate including a first layer, a second layer and a third layer located in sequence; a conductive section located between the second layer and the third layer, the conductive section including a portion extending in a circumferential direction of the first circular main surface and a portion extending in a radial direction of the first circular main surface; a first heater located between the first layer and the second layer; and a second heater located between the second layer and the third layer and connected to the conductive section, the second heater having an annular shape which surrounds the first heater and the conductive section when viewed in a transparent plan view of the sample holder.