MEMBRANE DEVICE INCLUDING MEMBRANE HAVING WRINKLES FORMED ALONG TRENCHES, METHOD FOR FABRICATING THE MEMBRANE DEVICE AND APPLIED APPARATUS OF THE MEMBRANE DEVICE

MEMBRANE DEVICE INCLUDING MEMBRANE HAVING WRINKLES FORMED ALONG TRENCHES, METHOD FOR FABRICATING THE MEMBRANE DEVICE AND APPLIED APPARATUS OF THE MEMBRANE DEVICE

A membrane device includes a trench substrate having trenches and a membrane having wrinkles. The membrane is not bonded to the trenches of the trench substrate but is bonded to the surface of the trench substrate in the shoulders of the trenches. Hills and valleys are alternately arranged in the me...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Kim, Jin Hyun, Park, Jin Soo, Lee, Byung Chul, Oh, Mintack
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
SEMICONDUCTOR DEVICES
TRANSPORTING
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Beschreibung
Zusammenfassung:A membrane device includes a trench substrate having trenches and a membrane having wrinkles. The membrane is not bonded to the trenches of the trench substrate but is bonded to the surface of the trench substrate in the shoulders of the trenches. Hills and valleys are alternately arranged in the membrane along the trenches. The membrane device can be used in various applications (for example, sensors) based on variations in the electrical properties of the membrane caused by a change in the shape of the wrinkles (a change in the strain) of the membrane in response to a change in the internal or external environment of the trenches.