SEMICONDUCTOR ELEMENT, SEMICONDUCTOR DEVICE, AND METHOD FOR MANUFACTURING SAME

A semiconductor element capable of adjusting a barrier height ϕBn and performing zero-bias operation and impedance matching with an antenna for improving detection sensitivity of high-frequency RF electric signals, a method of manufacturing the same, and a semiconductor device having the same. In th...

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Bibliographische Detailangaben
Hauptverfasser: Kotaka, Isamu, Shimizu, Makoto, Ishibashi, Tadao, Itoh, Hiroki
Format: Patent
Sprache:eng
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Zusammenfassung:A semiconductor element capable of adjusting a barrier height ϕBn and performing zero-bias operation and impedance matching with an antenna for improving detection sensitivity of high-frequency RF electric signals, a method of manufacturing the same, and a semiconductor device having the same. In the semiconductor element, a concentration of InGaAs (n-type InGaAs layer) is intentionally set to be high over a range for preventing the "change of the barrier height caused by the bias" described above up to a deep degeneration range. An electron Fermi level (EF) increases from a band edge of InGaAs (n-type InGaAs layer) to a band edge of InP (InP depletion layer).