SYSTEMS AND METHODS FOR DEPOSITING A THIN FILM ONTO A FLEXIBLE SUBSTRATE

Systems and methods for depositing a thin film layer onto a flexible ferromagnetic substrate include a porous block in a deposition zone and a plurality of magnets embedded within the porous block. The magnets provide a downward force on a flexible ferromagnetic substrate being transported over the...

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1. Verfasser: WIEDEMAN, Scott
Format: Patent
Sprache:eng
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Zusammenfassung:Systems and methods for depositing a thin film layer onto a flexible ferromagnetic substrate include a porous block in a deposition zone and a plurality of magnets embedded within the porous block. The magnets provide a downward force on a flexible ferromagnetic substrate being transported over the porous block, e.g., in a reel-to-reel system. Pressurized gas is forced upward through the porous block, providing an upward force that balances the downward force and supports the substrate at a desired height above the porous block. The substrate is thus held flat during transport through the deposition zone, enabling uniform deposition of a thin film layer.