SYSTEMS AND METHODS FOR DEPOSITING A THIN FILM ONTO A FLEXIBLE SUBSTRATE
Systems and methods for depositing a thin film layer onto a flexible ferromagnetic substrate include a porous block in a deposition zone and a plurality of magnets embedded within the porous block. The magnets provide a downward force on a flexible ferromagnetic substrate being transported over the...
Gespeichert in:
1. Verfasser: | |
---|---|
Format: | Patent |
Sprache: | eng |
Schlagworte: | |
Online-Zugang: | Volltext bestellen |
Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
Zusammenfassung: | Systems and methods for depositing a thin film layer onto a flexible ferromagnetic substrate include a porous block in a deposition zone and a plurality of magnets embedded within the porous block. The magnets provide a downward force on a flexible ferromagnetic substrate being transported over the porous block, e.g., in a reel-to-reel system. Pressurized gas is forced upward through the porous block, providing an upward force that balances the downward force and supports the substrate at a desired height above the porous block. The substrate is thus held flat during transport through the deposition zone, enabling uniform deposition of a thin film layer. |
---|