SILOXAZANE COMPOUND AND COMPOSITION COMPRISING THE SAME, AND METHOD FOR PRODUCING SILCEOUS FILM USING THE SAME

To provide a siloxazane compound capable of shortening the time of a siliceous film producing process and a composition comprising the same. A siloxazane compound having a specific structure, wherein the ratio of the number of O atoms to the total number of O atoms and N atoms is 5% or more and 25%...

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Bibliographische Detailangaben
Hauptverfasser: KOZAKI, Rikio, NAKADAN, Naotaka, BARNICKEL, Bertram, OKAMURA, Toshiya, NAKAMOTO, Naoko
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:To provide a siloxazane compound capable of shortening the time of a siliceous film producing process and a composition comprising the same. A siloxazane compound having a specific structure, wherein the ratio of the number of O atoms to the total number of O atoms and N atoms is 5% or more and 25% or less, and in the spectrum of the siloxazane compound obtained by 29Si-NMR in accordance with the inverse gate decoupling method, the ratio of the area of the peak detected in −75 ppm to −90 ppm is 4.0% or less to the area of the peak detected in −25 ppm to −55 ppm; and a composition comprising the same.