ELECTRON BEAM IRRADIATING DEVICE

Provided is an electron beam irradiating device capable of emitting an electron beam from an electron beam generation source surrounded by a vacuum chamber to outside of the vacuum chamber through an electron beam exit window. The electron beam exit window includes: a grid; a window foil allowing th...

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Bibliographische Detailangaben
Hauptverfasser: SAKAI, Ichiro, INOUE, Norihiro, TERASAKA, Yohei, DAIKU, Hiroyuki
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:Provided is an electron beam irradiating device capable of emitting an electron beam from an electron beam generation source surrounded by a vacuum chamber to outside of the vacuum chamber through an electron beam exit window. The electron beam exit window includes: a grid; a window foil allowing the electron beam to pass therethrough; and a frame-shaped pressing member pressing the window foil against the grid. The surface of the grid has a groove section having an annular shape. A metal gasket is pressed between the groove section and the window foil.