MICROMECHANICAL COMPONENT

MICROMECHANICAL COMPONENT

A micromechanical component includes a substrate that extends along a main extension plane of the micromechanical component, the micromechanical component including a drive mass which is suspended on the substrate via a drive spring of the micromechanical component so as to be able to move relative...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Cardanobile, Stefano, Eid, Rudy
Format: Patent
Sprache:eng
Schlagworte:
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A micromechanical component includes a substrate that extends along a main extension plane of the micromechanical component, the micromechanical component including a drive mass which is suspended on the substrate via a drive spring of the micromechanical component so as to be able to move relative to the substrate, the micromechanical component including a test mass that is movably suspended relative to the drive mass, the drive spring being disposed in such a way that the drive mass and/or the test mass surround(s) the drive spring at least in part essentially parallel to the main extension plane.