METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE

A method of producing a structure containing a phase-separated structure, including: a step of using a resin composition for forming a phase-separated structure including a block copolymer and an ion liquid containing a compound (IL) having a cation moiety and an anion moiety to form a BCP layer (3)...

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Bibliographische Detailangaben
Hauptverfasser: YAMANO, Hitoshi, KAWAUE, Akiya, MIYAGI, Ken, DAZAI, Takahiro
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A method of producing a structure containing a phase-separated structure, including: a step of using a resin composition for forming a phase-separated structure including a block copolymer and an ion liquid containing a compound (IL) having a cation moiety and an anion moiety to form a BCP layer (3) containing a block copolymer on a substrate (1); and a step of vaporizing at least a part of the compound (IL), and phase-separating the BCP layer (3) to obtain a structure (3′) containing a phase-separated structure.