COMPOSITE STRUCTURE, SEMICONDUCTOR MANUFACTURING APPARATUS AND DISPLAY MANUFACTURING APPARATUS PROVIDED WITH COMPOSITE STRUCTURE

Disclosed is provision of a ceramic coat having an excellent low-particle generation as well as a method for assessing the low-particle generation of the ceramic coat. A composite structure including a substrate and a structure which is formed on the substrate and has a surface, wherein the structur...

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Bibliographische Detailangaben
Hauptverfasser:	TAKAHASHI, Yuuki, IWASAWA, Junichi, KINJO, Atsushi, AOSHIMA, Toshihiro, WADA, Takuma, ASHIZAWA, Hiroaki, TAKIZAWA, Ryoto
Format:	Patent
Sprache:	eng
Schlagworte:	ARTIFICIAL STONE BASIC ELECTRIC ELEMENTS CEMENTS CERAMICS CHEMISTRY COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F COMPOUNDS OF THE METALS BERYLLIUM, MAGNESIUM, ALUMINIUM,CALCIUM, STRONTIUM, BARIUM, RADIUM, THORIUM, OR OF THERARE-EARTH METALS COMPOUNDS THEREOF CONCRETE ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INORGANIC CHEMISTRY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES LIME, MAGNESIA MEASURING METALLURGY NON-METALLIC ELEMENTS PHYSICS REFRACTORIES SEMICONDUCTOR DEVICES SLAG TESTING TREATMENT OF NATURAL STONE
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Beschreibung
Zusammenfassung:	Disclosed is provision of a ceramic coat having an excellent low-particle generation as well as a method for assessing the low-particle generation of the ceramic coat. A composite structure including a substrate and a structure which is formed on the substrate and has a surface, wherein the structure includes a polycrystalline ceramic and the composite structure has luminance Sa satisfying a specific value calculated from a TEM image analysis thereof, can be suitably used as an inner member of a semiconductor manufacturing apparatus required to have a low-particle generation.