ACCELEROMETER SENSOR

A capacitive accelerometer sensor including first and second substrates is disclosed, wherein the first substrate comprises a resilient membrane having at least one first electrode and a proof mass attached to the resilient membrane; the second substrate includes at least one second electrode; and t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YAGHOOTKAR, Bahareh, QURESHI, Abdulqader, LEUNG, Albert, EDALATFAR, Fatemeh, BAHREYNI, Behraad, KHOSRAVIANI, Kourosh
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
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