ACCELEROMETER SENSOR

A capacitive accelerometer sensor including first and second substrates is disclosed, wherein the first substrate comprises a resilient membrane having at least one first electrode and a proof mass attached to the resilient membrane; the second substrate includes at least one second electrode; and t...

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Bibliographische Detailangaben
Hauptverfasser:	YAGHOOTKAR, Bahareh, QURESHI, Abdulqader, LEUNG, Albert, EDALATFAR, Fatemeh, BAHREYNI, Behraad, KHOSRAVIANI, Kourosh
Format:	Patent
Sprache:	eng
Schlagworte:	INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS TESTING
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Beschreibung
Zusammenfassung:	A capacitive accelerometer sensor including first and second substrates is disclosed, wherein the first substrate comprises a resilient membrane having at least one first electrode and a proof mass attached to the resilient membrane; the second substrate includes at least one second electrode; and the first and second substrates are bonded to each other such that the first electrode of the resilient membrane on the first substrate faces the second electrode and is separated from the second electrode on the second substrate by a capacitive gap; and the first and second substrates comprise a plurality of openings and electrical contacts electrically connected to each of the first and second electrodes, respectively.