THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICES

THREE-DIMENSIONAL SEMICONDUCTOR MEMORY DEVICES

Semiconductor memory devices are provided. A semiconductor memory device includes a cell array region including stacked structures and a word line cut region that extends between the stacked structures. Moreover, the semiconductor memory device includes a peripheral circuit region in a stack with th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: HONG, Sang Jun, PARK, Kyeong Jin
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:Semiconductor memory devices are provided. A semiconductor memory device includes a cell array region including stacked structures and a word line cut region that extends between the stacked structures. Moreover, the semiconductor memory device includes a peripheral circuit region in a stack with the cell array region and including a support pattern.