MICROEMULSION REMOVERS FOR ADVANCED PHOTOLITHOGRAPHY

MICROEMULSION REMOVERS FOR ADVANCED PHOTOLITHOGRAPHY

The present invention provides a microemulsion remover comprising, based on the total weight of the microemulsion remover, 1) from 10% to 60%, at least one organic solvent, ii) from 10% to 50%, at least one co-solvent, iii) from 0.1% to 10%, at least one base, iv) from 0.1% to 10%, at least one oxid...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Lu, Zhijian, Yamada, Shintaro, Schmitt, Adam K, Mohler, Carol E, Tucker, Christopher J, O'Connell, Kathleen M
Format: Patent
Sprache:eng
Schlagworte:
ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES
CANDLES
CHEMISTRY
DETERGENT COMPOSITIONS
DETERGENTS
FATTY ACIDS THEREFROM
METALLURGY
RECOVERY OF GLYCEROL
RESIN SOAPS
SOAP OR SOAP-MAKING
USE OF SINGLE SUBSTANCES AS DETERGENTS
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Beschreibung
Zusammenfassung:The present invention provides a microemulsion remover comprising, based on the total weight of the microemulsion remover, 1) from 10% to 60%, at least one organic solvent, ii) from 10% to 50%, at least one co-solvent, iii) from 0.1% to 10%, at least one base, iv) from 0.1% to 10%, at least one oxidizer, v) from 0.1% to 10%, at least one surfactant, and vi) water.