X-RAY INSPECTING DEVICE, X-RAY THIN FILM INSPECTING METHOD, AND METHOD FOR MEASURING ROCKING CURVE

In an X-ray inspection device according to the present invention, an X-ray irradiation unit 40 includes a first X-ray optical element 42 for focusing characteristic X-rays in a vertical direction, and a second X-ray optical element 43 for focusing the characteristic X-rays in a horizontal direction....

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Bibliographische Detailangaben
Hauptverfasser:	Verman, Boris, Yoshihara, Sei, Kambe, Makoto, Asano, Shigematsu, Kinefuchi, Takao, Ito, Yoshiyasu, Motono, Hiroshi, Omote, Kazuhiko, Higuchi, Akifusa, Yamaguchi, Ryotaro, Takahashi, Hideaki, Umegaki, Shiro, Ogata, Kiyoshi, Jiang, Licai, Horada, Katsutaka
Format:	Patent
Sprache:	eng
Schlagworte:	GAMMA RAY OR X-RAY MICROSCOPES INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES IRRADIATION DEVICES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS NUCLEAR ENGINEERING NUCLEAR PHYSICS PHYSICS TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR TESTING
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Beschreibung
Zusammenfassung:	In an X-ray inspection device according to the present invention, an X-ray irradiation unit 40 includes a first X-ray optical element 42 for focusing characteristic X-rays in a vertical direction, and a second X-ray optical element 43 for focusing the characteristic X-rays in a horizontal direction. The first X-ray optical element 42 is constituted by a crystal material having high crystallinity. The second X-ray optical element includes a multilayer mirror.