CONDUCTIVITY SENSOR AND SYSTEM AND METHOD FOR PROCESSING SUBSTRATES INCORPORATING THE SAME

A conductivity sensor, a system for processing flat articles that includes a conductivity sensor, and a method of measuring conductivity of a fluid in a semiconductor processing system. The conductivity sensor includes a probe portion and a data analysis portion that are operably coupled together. T...

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Bibliographische Detailangaben
Hauptverfasser:	Rieker, Jennifer, Benjamin, Robert, Kashkoush, Ismail, Nemeth, Dennis
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	A conductivity sensor, a system for processing flat articles that includes a conductivity sensor, and a method of measuring conductivity of a fluid in a semiconductor processing system. The conductivity sensor includes a probe portion and a data analysis portion that are operably coupled together. The probe portion includes a housing extending along a longitudinal axis, a first tube extending through and protruding from the housing, and a second tube extending through and protruding from the housing. A first toroid surrounds the first tube within the cavity of the housing and a second toroid surrounds the second tube within the cavity of the housing. The first toroid may be operably coupled to an alternating current source of the data analysis portion and the second toroid may be operably coupled to a receiver of the data analysis portion.