SCALE AND MANUFACTURING METHOD OF THE SAME

A scale includes: a substrate; a first metal layer formed on the substrate; a second metal layer formed on the first metal layer; and scale gratings that are formed on the second metal layer and have a plurality of metal gratings at a predetermined interval, wherein the first metal layer is made of...

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Bibliographische Detailangaben
1. Verfasser:	Aoki, Toshihiko
Format:	Patent
Sprache:	eng
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TARIFF METERING APPARATUS TESTING
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Beschreibung
Zusammenfassung:	A scale includes: a substrate; a first metal layer formed on the substrate; a second metal layer formed on the first metal layer; and scale gratings that are formed on the second metal layer and have a plurality of metal gratings at a predetermined interval, wherein the first metal layer is made of a first metal, wherein the second metal layer is made of a second metal, wherein adhesion of the first metal with the substrate is higher than adhesion of the second metal with the substrate, and wherein a reflectivity of the second metal with respect to a wavelength of a used light is higher than a reflectivity of the first metal layer with respect to the wavelength of the used light.