Methods Used In Forming At Least A Portion Of At Least One Conductive Capacitor Electrode Of A Capacitor That Comprises A Pair Of Conductive Capacitor Electrodes Having A Capacitor Insulator There-Between And Methods Of Forming A Capacitor
A method used in forming at least a portion of at least one conductive capacitor electrode of a capacitor that comprises a pair of conductive capacitor electrodes having a capacitor insulator there-between comprises forming an insulative first material comprising an amorphous insulative metal oxide....
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A method used in forming at least a portion of at least one conductive capacitor electrode of a capacitor that comprises a pair of conductive capacitor electrodes having a capacitor insulator there-between comprises forming an insulative first material comprising an amorphous insulative metal oxide. The amorphous insulative metal oxide is reduced in a reducing-ambient to form a conductive second material from the insulative first material. Such reducing in the reducing-ambient both (a) removes oxygen from and changes the stoichiometry of the metal oxide, and (b) crystallizes the metal oxide into a crystalline state that is conductive. |
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