POSITION DETERMINING SYSTEM

POSITION DETERMINING SYSTEM

An XYZ flexural mechanism comprising an X-axis flexural mechanism comprising a first voice coil actuator, a motion stage platform, a plurality of flexural bearings, and a plurality of guide rods, a Y-axis flexural mechanism comprising a second voice coil actuator, a plurality of flexural bearings, a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Mulik, Sharad S, Deshmukh, Suhas Pandurang, Shewale, Mahesh Shivaji, Razban, Ali, Zambare, Hrishikesh Balasaheb
Format: Patent
Sprache:eng
Schlagworte:
CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
DYNAMO-ELECTRIC MACHINES
ELECTRICITY
GENERATION
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:An XYZ flexural mechanism comprising an X-axis flexural mechanism comprising a first voice coil actuator, a motion stage platform, a plurality of flexural bearings, and a plurality of guide rods, a Y-axis flexural mechanism comprising a second voice coil actuator, a plurality of flexural bearings, a plurality of guide rods, and a frame, and a Z-axis flexural mechanism comprising a third voice coil actuator, a plurality of flexural bearings, a plurality of guide rods, and a frame, the frame supporting the XYZ flexural mechanism.