SCALE AND MANUFACTURING METHOD OF THE SAME

A scale includes: a substrate that is made of low expansion glass of which a thermal expansion coefficient is 1×10−7/K or less; and scale gratings having a plurality of gratings that are arranged on a first face of the substrate at a predetermined interval and are made of a transparent inorganic mat...

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Bibliographische Detailangaben
1. Verfasser:	Aoki, Toshihiko
Format:	Patent
Sprache:	eng
Schlagworte:	ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVEREDIN A SINGLE OTHER SUBCLASS MEASURING MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TARIFF METERING APPARATUS TESTING
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Beschreibung
Zusammenfassung:	A scale includes: a substrate that is made of low expansion glass of which a thermal expansion coefficient is 1×10−7/K or less; and scale gratings having a plurality of gratings that are arranged on a first face of the substrate at a predetermined interval and are made of a transparent inorganic material of which a thermal expansion coefficient is more than 1×10−7/K.