GAS PURGE UNIT AND LOAD PORT APPARATUS

GAS PURGE UNIT AND LOAD PORT APPARATUS

A gas purge unit introduces a cleaning gas into a purge container with an opening therethrough. The gas purge unit includes a first blowout member second blowout member. The first blowout member is disposed along a lateral the opening and includes a first nozzle port. The first nozzle port blows the...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: EMOTO, Jun, IWAMOTO, Tadamasa
Format: Patent
Sprache:eng
Schlagworte:
CLEANING
CLEANING IN GENERAL
PERFORMING OPERATIONS
PREVENTION OF FOULING IN GENERAL
TRANSPORTING
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Beschreibung
Zusammenfassung:A gas purge unit introduces a cleaning gas into a purge container with an opening therethrough. The gas purge unit includes a first blowout member second blowout member. The first blowout member is disposed along a lateral the opening and includes a first nozzle port. The first nozzle port blows the cleaning gas into the purge container. The second blowout member is disposed along the lateral side and includes a second nozzle port. The second nozzle port is disposed farther from the opening than the first nozzle port and blows the cleaning gas into the purge container. A load port apparatus includes the gas purge unit.