Semiconductor Device Having Contact Trenches Extending from Opposite Sides of a Semiconductor Body

A semiconductor device includes a semiconductor body includes a first side and a second side opposite to the first side, a first dielectric disposed on the first side, a second dielectric disposed on the second side, one or more FET devices disposed at the first side, a first contact trench extendin...

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Bibliographische Detailangaben
Hauptverfasser: Meiser, Andreas, Lang, Hans-Peter, Irsigler, Peter, Zundel, Markus, Meyer, Thorsten
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:A semiconductor device includes a semiconductor body includes a first side and a second side opposite to the first side, a first dielectric disposed on the first side, a second dielectric disposed on the second side, one or more FET devices disposed at the first side, a first contact trench extending through the first dielectric at the first side, a first conductive material disposed in the first contact trench and electrically connected to the semiconductor body, a second contact trench extending through the second dielectric and into the semiconductor body at the second side, and a second conductive material disposed in the second contact trench and electrically connected to the semiconductor body at sidewalls of the second contact trench.