MONITORING DEVICE

A monitoring device for movement monitoring for at least one MEMS actuator having at least one detection unit, which is set up to detect at least one movement signal of the MEMS actuator that includes at least one characteristic movement value of the at least one MEMS actuator. It is provided that t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Ehlert, Alexander, Specht, Hendrik, Puttmann, Christoph
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES THEREFOR APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USINGWAVES OTHER THAN OPTICAL WAVES APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FORPROJECTING OR VIEWING THEM CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHOTOGRAPHY PHYSICS
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Beschreibung
Zusammenfassung:	A monitoring device for movement monitoring for at least one MEMS actuator having at least one detection unit, which is set up to detect at least one movement signal of the MEMS actuator that includes at least one characteristic movement value of the at least one MEMS actuator. It is provided that the monitoring device includes at least one first comparator unit, which is set up to compare the at least one characteristic movement value of the at least one MEMS actuator to at least one reference value.