APPARATUS FOR FEEDING A LIQUID MATERIAL TO AN EVAPORATOR DEVICE

An apparatus for feeding liquid metal to an evaporator device in a vacuum chamber, wherein the apparatus includes a container adapted to contain a liquid metal, a feed tube from the closed container to the evaporator device and an electromagnetic pump provided in the feed tube, and wherein the elect...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: ZOESTBERGEN, Edzo, HAZELETT, Peter William, WIDDIS, Stephen James, COMMANDEUR, Colin, BAKKER, Eduard Paul Mattheus, KAISER, Timothy Dean, HAMILTON, Douglas Alexander, SNIJDERS, Roland Jan
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:An apparatus for feeding liquid metal to an evaporator device in a vacuum chamber, wherein the apparatus includes a container adapted to contain a liquid metal, a feed tube from the closed container to the evaporator device and an electromagnetic pump provided in the feed tube, and wherein the electromagnetic pump is placed in a vacuum enclosure.