CRYOGENIC CELL FOR MOUNTING A SPECIMEN IN A CHARGED PARTICLE MICROSCOPE

CRYOGENIC CELL FOR MOUNTING A SPECIMEN IN A CHARGED PARTICLE MICROSCOPE

A method of examining a cryogenic specimen in a Charged Particle Microscope, comprising: - Providing the specimen in a cryogenic cell on a specimen holder; - Directing a charged particle beam from a source and along an axis through an evacuated beam conduit of an illuminator system so as to irradiat...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: VAN DE WATER, Gerbert Jeroen, JONKERS, Roland W.P, VAN DUINEN, Gijs, VAN DEN BOOM, Stephanus H.L, SAKELLARIOU, Fotios
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:A method of examining a cryogenic specimen in a Charged Particle Microscope, comprising: - Providing the specimen in a cryogenic cell on a specimen holder; - Directing a charged particle beam from a source and along an axis through an evacuated beam conduit of an illuminator system so as to irradiate at least a portion of the specimen therewith; - Using a detector to detect radiation emanating from the specimen in response to said irradiation, further comprising: - Configuring said cell to comprise an elongate tube that extends within said beam conduit into said illuminator system and encloses said axis; - Maintaining said tube at a cryogenic temperature at least during said irradiation.