ENCODER SCALE, MANUFACTURING METHOD FOR ENCODER SCALE, AND ENCODER
An encoder scale includes a tabular base material and an optical pattern provided above one surface of the base material, a first region and a second region being disposed side by side above the optical pattern. The first region includes a resin layer disposed above the base material and including p...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | An encoder scale includes a tabular base material and an optical pattern provided above one surface of the base material, a first region and a second region being disposed side by side above the optical pattern. The first region includes a resin layer disposed above the base material and including photosensitive resin and a metal film disposed above the resin layer and formed of a metal material. The surface of the first region is configured mainly by a first surface having a normal line in the thickness direction of the base material. The surface of the second region is configured mainly by a second surface inclined with respect to the first surface. |
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