METHOD OF PERFORMING METROLOGY OPERATIONS AND SYSTEM THEREOF

METHOD OF PERFORMING METROLOGY OPERATIONS AND SYSTEM THEREOF

One or more metrology objects and one or more metrology operations may be identified. A design-based representation of a first metrology object of the one or more metrology objects may be received. Furthermore, an image-based representation of the first metrology object of the one or more metrology...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: BATIKOFF, Amit, SHACHAR, Lavi, COHEN, Shaul, ZAC, Noam, KATZIR, Ron, KISSOS, Imry
Format: Patent
Sprache:eng
Schlagworte:
CALCULATING
COMPUTING
COUNTING
ELECTRIC DIGITAL DATA PROCESSING
PHYSICS
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Beschreibung
Zusammenfassung:One or more metrology objects and one or more metrology operations may be identified. A design-based representation of a first metrology object of the one or more metrology objects may be received. Furthermore, an image-based representation of the first metrology object of the one or more metrology objects may be received where the one or more metrology operations include a first metrology operation associated with the first metrology object that is to be performed on the image-based representation of the first metrology object. The design-based representation of the first metrology object may be mapped with the image-based representation of the first metrology object. The first metrology operation may be performed based on the mapping.