DOOR APPARATUS FOR CHAMBER

The present invention relates to a door apparatus for a chamber, and according to one aspect of the present invention, there is provided a door apparatus for a chamber comprising: a pair of guide rails provided at an inlet side of the chamber; a support frame movably disposed along the pair of guide...

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Bibliographische Detailangaben
1. Verfasser: CHANG, In Jae
Format: Patent
Sprache:eng
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