DOOR APPARATUS FOR CHAMBER

The present invention relates to a door apparatus for a chamber, and according to one aspect of the present invention, there is provided a door apparatus for a chamber comprising: a pair of guide rails provided at an inlet side of the chamber; a support frame movably disposed along the pair of guide...

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Bibliographische Detailangaben
1. Verfasser: CHANG, In Jae
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:The present invention relates to a door apparatus for a chamber, and according to one aspect of the present invention, there is provided a door apparatus for a chamber comprising: a pair of guide rails provided at an inlet side of the chamber; a support frame movably disposed along the pair of guide rails; a door mounted to the support frame to be positioned between the inlet side of the chamber and the support frame; a first drive part provided to move the support frame along the pair of guide rails; and a second drive part provided to move the door relative to the support frame for pressing the door to the inlet or detaching it from the inlet with the door being positioned in front of the inlet by the first drive part.