GETTER MATERIAL COMPRISING INTRINSIC COMPOSITE NANOPARTICLES AND METHOD OF PRODUCTION THEREOF

The present invention relates to a getter material and a production method thereof. The method enables control of a sol-gel process so that a nanoparticle getter material with intrinsic nanoparticles in a size range from 10 nm to 1 μm can be produced with accurate size control. The intrinsic nanopar...

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Bibliographische Detailangaben
Hauptverfasser: YANG, Jiaojiao, ÅRHAMMAR, Cecilia, CHEUNG, Ocean, ZHANG, Peng, FRYKSTRAND ÅNGSTRÖM, Sara, REMONEN, Tommi
Format: Patent
Sprache:eng
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Zusammenfassung:The present invention relates to a getter material and a production method thereof. The method enables control of a sol-gel process so that a nanoparticle getter material with intrinsic nanoparticles in a size range from 10 nm to 1 μm can be produced with accurate size control. The intrinsic nanoparticles of the getter material are composites of magnesium oxide and amorphous magnesium carbonate, substances that have properties that are highly interesting for getter applications. The composition ratio of magnesium oxide to magnesium carbonate may preferably be in the range from 5:95 to 50:50.